Apparatus for examining samples by electron emission
US4654556A · kind A · utility
9Cited by
5References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 12, 1983 |
| Grant date | Mar 31, 1987 |
| Priority date | — |
| Expiry date | Oct 12, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/227
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to the examination of samples which, by thermal or photon excitation, are able to emit electrons. These electrons are detected and located by a counter incorporating a cathode forming a mesh network. Pointed anodes coincide with the axes of the meshes. The enclosure of the apparatus is sealed by the sample and its excitation means. The invention can be used in dosimetry or in the checking of surface states.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.