Cryopump with exhaust filter
US4655046A · kind A · utility
9Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 1985 |
| Grant date | Apr 7, 1987 |
| Priority date | — |
| Expiry date | Jul 19, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An exhaust port from a cryopump vacuum vessel leads to an exhaust valve. The valve is protected from contamination by a filter standpipe which extends from the exhaust port into the vacuum vessel and which is open at its end opposite to the exhaust port. The standpipe is of porous material which allows the free flow of gas, water, and liquid cryogens therethrough while retaining contaminating debris within the vacuum vessel. The filter conduit is of screen formed into a cylinder. One end is tapered and pressed into the exhaust conduit. The screen cylinder is stopped in the exhaust conduit by a circumferential ridge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.