Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture
US4661709A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1985 |
| Grant date | Apr 28, 1987 |
| Priority date | — |
| Expiry date | Jun 28, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3007
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides a modular-building block method and system of fabrication, installation, alignment and operation of a multi-beam assembly of miniaturized, all-electrostatic charged particle optical columns, such electron beam or ion beam optical columns mounted in parallel in a closely packed cluster over a small target surface area for parallel simultaneous charged particle beam writing on the target surface with the multiple-channel cluster of charged particle beam optical columns. The assembly provides a system and method of increased thru-put in the direct charged particle beam writing on semiconductor target wafers during fabrication of semiconductor micro-circuit chips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.