Telescoping low vibration pulling mechanism for Czochralski crystal growth
US4662860A · kind A · utility
1Cited by
9References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1985 |
| Grant date | May 5, 1987 |
| Priority date | — |
| Expiry date | Feb 26, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1072
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A telescoping low vibration pulling mechanism for use in Czochralski crystal growth apparatus, comprising a broached bushing which defines an internal circumference of teeth therein, which teeth cooperate with complimentary teeth defined on the circumference of a splined shaft. The bushing is coupled to a motor drive via a hollow tube and the splined shaft, couplable to a seed shaft and an elevation assembly, telescopes through said bushing within said hollow tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.