Neutral particle surface alteration
US4662977A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 1986 |
| Grant date | May 5, 1987 |
| Priority date | — |
| Expiry date | May 5, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/14
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A plasma gun is described which is capable of creating and directing a plasma towards a neutralizing plate. The plate is comprised of a material which is chemically inert, metallic, and whose atoms are substantially heavier than the atoms of the plasma gas. The plasma, upon impacting the neutralizing plate, picks up sufficient electrons to cause the ions to revert to their neutral state. The particles, upon hitting the neutralizing plate, are redirected towards a substrate whose surface is to be altered or eroded. A potential may be applied to the neutralizing plate to enable the energy of the reflected particles to be controlled. The neutral atoms, so redirected, provide a desired anisotropic erosion capability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.