High-temperature resistant photoresists featuring maleimide binders
US4663268A · kind A · utility
16Cited by
8References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 1986 |
| Grant date | May 5, 1987 |
| Priority date | — |
| Expiry date | Feb 24, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0233
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is disclosed a resist comprising a radiation-sensitive sensitizer that produces, with a binder, imagewise differential solubility when imagewise exposed. The resist is improved in that the binder has a rigid heterocyclic ring structure with the formula ##STR1##
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.