Process of manufacturing a photosensitive device having a plurality of detectors separated by zones impervious to the radiation to be detected
US4665609A · kind A · utility
4Cited by
2References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1984 |
| Grant date | May 19, 1987 |
| Priority date | — |
| Expiry date | Dec 21, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S257/906
Abstract
The surface of a substrate which includes a plurality of photovoltaic junctions spaced along it is prepared as follows: a first anodic oxide layer is formed to cover the whole surface of the substrate and ensures perfect control of the photovoltaic junctions, a second layer is deposited of metal which is impervious to the radiation to be detected, then through photolithography, only the zones of the second layer that it is desired to render impervious to the radiation to be detected are maintained and the remainder removed; and finally, a layer of dielectric material is deposited to cover the whole surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.