Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
US4667058A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 1985 |
| Grant date | May 19, 1987 |
| Priority date | — |
| Expiry date | Jul 1, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/94
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of fabricating electrically isolated photovoltaic modules arrayed on a substrate by forming overlying front contact strips, photovoltaic strips, and back contact strips on a flat transparent substrate, laser scribing between modules to electrically isolate adjacent modules for the simultaneous testing and electrical curing of the modules on a single substrate, and plasma etching the inter-module grooves formed by the laser isolation step to improve the percentage of modules on a single substrate that pass minimum performance criteria. Also disclosed is an array of electrically isolated, thin-film semiconductor devices fabricated on a single substrate, wherein adjacent semiconductor devices are separated by laser-scribed grooves extending through the devices to the substrate and the walls of the grooves have been etched by plasma etching.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.