Impedance matched and thermally cooled deflection amplifiers for charged particle beam apparatus employing deflectors
US4667108A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1985 |
| Grant date | May 19, 1987 |
| Priority date | — |
| Expiry date | Jun 28, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved deflection amplifier interconnection circuit structure for charged particle beam write/read apparatus having a deflector stage wherein the charged particle apparatus is mounted within an evacuated housing by a support member. Transmission line-type printed wiring conductor patterns are provided within the insulating support member which serves as a combined electrical and vacuum feed-thru structure. The transmission line-type printed wiring conductor pattern interconnects the output of a deflector drive amplifier to the deflector element of the charged particle beam apparatus within the evacuated housing. An improved impedance match between the deflector drive amplifier and the deflector element is obtained along with improved cooling capability for the amplifier and elimination of the need for mounting the amplifier within a separate housing remotely located from the evacuated housing for the charged particle apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.