Circuit arrangement for compensating for the temperature dependence of the sensitivity and the null point of a piezoresistive pressure sensor
US4667516A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 17, 1986 |
| Grant date | May 26, 1987 |
| Priority date | — |
| Expiry date | Jan 17, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S323/907
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A circuit arrangement for compensating for the temperature dependence of the sensitivity and of the null point of a piezoresistive pressure sensor having a temperature sensor thermally coupled thereto. The temperature sensor is coupled to an auxiliary amplifier, in the output circuit of which the feed diagonal of the pressure sensor is connected. The output diagonal of the pressure sensor is connected to an output amplifier, to which a temperature-dependent correction voltage can be applied on the input side via a resistor arrangement. To perform the compensation of the temperature dependence of the sensitivity independently of the temperature dependence of the null point, the resistor arrangement is connected directly to the output of the temperature sensor, preferably via jumpers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.