Method for amorphizing a material by means of injection of exotic atoms into a solid with electron beams
US4668527A · kind A · utility
20Cited by
2References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 16, 1985 |
| Grant date | May 26, 1987 |
| Priority date | — |
| Expiry date | Sep 16, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/2636
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for amorphizing a material comprises attaching a thin film consisting of exotic atoms to a parent material, irradiating the two layer material under given conditions of irradiation from the side of the thin film with electron beams, and injecting forcibly the exotic atoms into the parent material to change the material into an amorphous material. This method can produce amorphous materials having new functions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.