P.sub.4 gas generator using the alkali metal polyphosphide MP.sub.15
US4670241A · kind A · utility
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10Claims
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Key dates
| Filing date | Mar 13, 1985 |
| Grant date | Jun 2, 1987 |
| Priority date | — |
| Expiry date | Mar 13, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K10/462
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
MP.sub.15, where M is an alkali metal is used in a generator of P.sub.4 gas. KP.sub.15 is preferred. The generator is heated to produce the P.sub.4 gas. The generator may be used in various deposition processes such as chemical vapor deposition, vacuum evaporation, and molecular beam deposition. It is particularly useful in high vacuum processes below 10.sup.-3 Torr, particularly below 10.sup.-4 Torr such as vacuum evaporation and molecular beam deposition, for example vapor phase epitaxy and molecular beam epitaxy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.