Patent · US Expired

Apparatus for performing the SNMS method

US4670651A · kind A · utility

5Cited by

2References

9Claims

0Family size

Assignee

Leybold-Heraeus GmbH · DE

Inventors

Stefan Meier · Neubiberg, DE
Karl-Heinz Muller · Wissen, DE

Key dates

Filing date	Sep 25, 1985
Grant date	Jun 2, 1987
Priority date	—
Expiry date	Sep 25, 2005

Classification

Technology area (CPC A)Human Necessities
CPC primaryA61B2017/00004
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus for the performance of the SNMS process, having a separate ion source, a sample holder, a system for the production of a radio-frequency plasma and a mass analyzer, in which the ion source and the mass analyzer are disposed side by side on the same side of the chamber provided for the radio-frequency plasma, and in which the sample mounted on the sample holder is situated within the chamber provided for the radio-frequency plasma. This apparatus can be used not only for the performance of the two kinds of SNMS operation (DMB and SBM) but also secondary ion mass spectroscopy (SIMS) under optimum spatial conditions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.