Patent · US Expired

Device for checking mobile electrical charges in a MOS integrated circuit

US4672313A · kind A · utility

4Cited by

5References

5Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Joel Hartmann · Le Pont-de-Claix, FR
Pierre Jeuch · Chauny, FR

Key dates

Filing date	Feb 16, 1984
Grant date	Jun 9, 1987
Priority date	—
Expiry date	Feb 16, 2004

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2831
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device for checking the mobile electrical charges in a MOS integrated circuit having a wafer support, a polarization means applying a potential difference between the two faces of the silicon wafer on which are formed the integrated circuits by means of two electrodes, one constituted by a conductive diaphragm covering the silicon wafer and which is kept in contact with the silicon wafer by a pressure difference between these two faces, while the other is constituted by the electrically conductive wafer support.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.