Providing of gases for an excimer laser
US4674098A · kind A · utility
2Cited by
3References
20Claims
0Family size
Inventor
Key dates
| Filing date | May 31, 1985 |
| Grant date | Jun 16, 1987 |
| Priority date | — |
| Expiry date | May 31, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/036
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of reducing an expenditure of a rare gas in an excimer laser system includes evacuating a lasing material including a mixture of diluent rare gas and removing therefrom halogen compounds. Supplemental lasing material is then added to the lasing mixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.