Film forming apparatus
US4674436A · kind A · utility
6Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 16, 1985 |
| Grant date | Jun 23, 1987 |
| Priority date | — |
| Expiry date | Apr 16, 2005 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for forming a monomolecular film or a monomolecular built-up film on a substrate, which comprises a tank, a frame for dividing a liquid surface in the tank and a support for moving the substrate horizontally in the liquid without disordering the liquid surface within the frame which contains the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.