Method and apparatus for feeding drug liquid from hermetic returnable can
US4676404A · kind A · utility
61Cited by
10References
10Claims
0Family size
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Inventors
Key dates
| Filing date | Oct 12, 1984 |
| Grant date | Jun 30, 1987 |
| Priority date | — |
| Expiry date | Oct 12, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/314
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while detecting its volume, in the case where the doping liquid is fed from a liquid-filled hermetic returnable can to the doping liquid treatment process, and a feeding monitor apparatus is connected between the returnable can and treatment process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.