Optical disk transmission monitor for deposited films
US4676883A · kind A · utility
6Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 1986 |
| Grant date | Jun 30, 1987 |
| Priority date | — |
| Expiry date | Mar 3, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8422
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical transmission monitor for determining the optical transmissivity and thickness of films deposited on a substrate. A monitor substrate in the form of a rotating disk exposed to the deposition process is used. An optical system for measuring the transmissivity of the disk obstructs a fixed segment of the rotating disk so that the film thickness on the monitor disk is a known fraction of the film on the substrate being processed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.