Semiconductor-type flow rate detecting apparatus
US4677850A · kind A · utility
41Cited by
10References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 1986 |
| Grant date | Jul 7, 1987 |
| Priority date | — |
| Expiry date | Mar 21, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F5/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a semiconductor-type flow rate detecting apparatus, a casing arranged in the fluid path includes first and second semiconductor chips. The first semiconductor chip has a first temperature detector. The second semiconductor chip arranged in proximity to the first semiconductor chip has a heater and a second temperature detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.