Integrated force balanced accelerometer
US4679434A · kind A · utility
130Cited by
11References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 25, 1985 |
| Grant date | Jul 14, 1987 |
| Priority date | — |
| Expiry date | Jul 25, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/54
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer fabricated from a semiconductor substrate sandwiched between two non-conductive plates is shown having an inertial mass formed by etching the substrate. The mass is joined to the substrate by hinges having crossed blades to provide flexure in one direction and rigidity in other directions. The fabrication technique permits the integration of accelerometer servo and signal processing circuitry upon the same substrate in which the accelerometer mass is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.