Method for interconnecting the active zones and gates of CMOS integrated circuits
US4682403A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1985 |
| Grant date | Jul 28, 1987 |
| Priority date | — |
| Expiry date | Mar 25, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for interconnecting the active zones and/or gates of CMOS integrated circuits. The method comprises, during the formation of the gates in a first conductive coating, defining in the latter the dimensions of the connections to be produced, and wherein following the formation of the active zones, the gates are laterally insulated and then a second conductive coating producing the desired connections is deposited on the complete circuit, with the exception of the lateral insulation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.