Flow rate detecting apparatus having semiconductor chips
US4682496A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 1985 |
| Grant date | Jul 28, 1987 |
| Priority date | — |
| Expiry date | Jan 10, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor type flow rate detecting apparatus having first and second control units arranged at upstream and downstream positions respectively in a flow stream to be measured and an operation circuit. The first control unit includes a first temperature detecting element and a first temperature control heater. The second control unit includes a second temperature detecting element, a second temperature control heater and a preliminary heater. The operation circuit controls the second and preliminary heaters and generates a signal indicative of flow rate. The operation circuit has a constant power consumption circuit to control heat from the preliminary heater to a constant level.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.