Vapor nozzle with gas barrier bars
US4682565A · kind A · utility
21Cited by
6References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 16, 1986 |
| Grant date | Jul 28, 1987 |
| Priority date | — |
| Expiry date | Jan 16, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G4/306
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A vacuum vapor depositing system in which a plurality of vapor delivering nozzles fit between, and are guided by, bars supplying inert gas as barrier regions controlling the lateral spread of the vaporized material being deposited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.