Cubic boron nitride preparation
US4683043A · kind A · utility
25Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 1986 |
| Grant date | Jul 28, 1987 |
| Priority date | — |
| Expiry date | Jan 21, 2006 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/0647
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for producing coatings comprising cubic boron nitride on a substrate is disclosed. The process involves magnetron sputter deposition of a heated BN source in an evacuated atmosphere having a limited partial pressure of nitrogen and a noble gas. During cathodic sputtering of the BN source, a metal dopant selected from Groups IA, IVA, VA, VIIA, IB, IIB, IIIB, IVB and VB of the periodic table, the metal dopant preferably being Al or Cu, is deposited at a concentration less than 1.5 atomic percent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.