Method of manufacturing MIM elements in liquid crystal displays
US4683183A · kind A · utility
24Cited by
2References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 10, 1985 |
| Grant date | Jul 28, 1987 |
| Priority date | — |
| Expiry date | Jan 10, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1365
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming a MIM element for use in liquid crystal displays. The MIM element is formed on a substrate using photolithography with a self-alignment method where one of the metal electrodes forming the MIM element acts as a radiation mask to radiation use in forming the element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.