Gas and fire alarm and control system for semiconductor factories or the like
US4683463A · kind A · utility
3Cited by
4References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 3, 1986 |
| Grant date | Jul 28, 1987 |
| Priority date | — |
| Expiry date | Oct 3, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG08B17/11
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An alarm and control system for semiconductor factories or the like includes, at locations where poisonous and inflammable gases such as silane gas are used as in the manufacturing process of semiconductors, gas detectors to detect the leakage of the treatment gases and fire detectors to detect products of combustion of the treatment gases, and these detectors are adapted to cause, upon any changes in the output state of either of them, an alarm to issue and a protection device such as a fire distinguishing device as well as the manufacturing process to be controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.