Production method of thin film magnetic head
US4685014A · kind A · utility
24Cited by
6References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 1982 |
| Grant date | Aug 4, 1987 |
| Priority date | — |
| Expiry date | Jul 29, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49064
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In producing a magnetic head by thin film technique, a magnetic film is formed on an insulating member covering coil conductor films after the surface of the insulating member is flattened. After a flattening coating is formed on the insulating member, the flattening coating as well as the insulating member are etched by plasma-assisted etching technique in order to flatten the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.