Fine positioning device
US4686440A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jan 31, 1986 |
| Grant date | Aug 11, 1987 |
| Priority date | — |
| Expiry date | Jan 31, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N2/028
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A fine positioning device is constructed of a parallel flexible-beam displacement mechanism and/or a radial flexible-beam displacement mechanism. The former displacement mechanism comprises a first rigid portion rigid against forces, a second rigid portion rigid against forces, plural parallel flexible beams connecting the first and second rigid portions together, and a first actuator adapted to have the plural flexible beams undergo bending deformation. The latter displacement mechanism comprises a third rigid portion rigid against torques, a fourth rigid portion rigid against torques, plural radial flexible beams connecting the third and fourth rigid portions together, and a second actuator adapted to have the plural flexible beams undergo bending deformation. The fine positioning device can obtain fine linear displacements and/or fine angular displacement with good accuracy. This invention also facilitates the construction of multi-axis positioning devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.