Membrane protected pressure sensor
US4686764A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 1986 |
| Grant date | Aug 18, 1987 |
| Priority date | — |
| Expiry date | Apr 22, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A solid state semiconductor pressure sensor is described in which the pressure sensor element is protected from the ambient whose pressure is being measured by a combination of a pressure transfer medium and a thin covering membrane. A method is described for applying the thin covering membrane so as to substantially avoid entrapment of air or formation of voids in the pressure transfer medium which would degrade the performance of the sensor. The pressure transfer medium is a gel-like material such as a silastic. The membrane is chosen to be substantially impermeable to the ambients being measured and sufficiently flexible to be rolled across the surface of the assembly during fabrication and to avoid attenuation of the input pressure signal. Fluorosilicone is an example of a suitable membrane material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.