High voltage feedthrough for ion pump
US4687417A · kind A · utility
5Cited by
5References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1985 |
| Grant date | Aug 18, 1987 |
| Priority date | — |
| Expiry date | Dec 19, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01B17/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Ion pump (10) has feedthrough (33) for electrical connection to anode post (32) within the pumping chamber. Opening (36) in the pumping chamber wall receives a portion of insulator (42). The insulator (42) has a flange (48) which is of larger diameter than the opening (36) so that sputtered cathode material cannot directly disposit on the outer and upper surfaces of the flange (48).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.