Method of synthesizing a plurality of reactants and producing thin films of electro-optically active transition metal oxides
US4687560A · kind A · utility
28Cited by
11References
9Claims
0Family size
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Key dates
| Filing date | Aug 16, 1985 |
| Grant date | Aug 18, 1987 |
| Priority date | — |
| Expiry date | Aug 16, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1524
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of synthesizing electro-optically active reaction products from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of electro-optically active transition metal oxides.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.