Block polymer compositions
US4689289A · kind A · utility
38Cited by
3References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 30, 1986 |
| Grant date | Aug 25, 1987 |
| Priority date | — |
| Expiry date | Apr 30, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/126
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.