Position adjustment device with a piezoelectric element as a lock mechanism
US4689516A · kind A · utility
13Cited by
8References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1986 |
| Grant date | Aug 25, 1987 |
| Priority date | — |
| Expiry date | Apr 28, 2006 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23Q1/34
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A position adjustment device employs a holder on which a semiconductor wafer is attached. When placed on a surface plate, the wafer holder is turned upside-down, so that unlocked leg rods and the pattern transfer surface of the wafer are in direct contact with a reference surface of the plate. Piezoelectric elements are embedded in the holder as locking mechanism for the movable leg rods. In response to a variable DC voltage supplied by a voltage generating circuit, the piezoelectric elements deform to lock the rods with high accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.