Pyrolytic boron nitride article
US4690841A · kind A · utility
8Cited by
5References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 1986 |
| Grant date | Sep 1, 1987 |
| Priority date | — |
| Expiry date | Feb 19, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/13
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A pyrolytic boron nitride article has a uniform structure 0.5 or less nodules/cm.sup.2 in average all through the overall surface of the article and 2 or less nodules in any portion of a unit square centimeter on the surface of the article. The pyrolytic boron nitride article is produced by depositing boron nitride through a vapor phase, using a boron halide gas and an ammonia gas as the starting materials. In production, the ammonia gas or a gas mixture containing the ammonia gas is not contacted directly with graphite at 300.degree. to 1850.degree. C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.