Vacuum coating apparatus
US4692233A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 5, 1984 |
| Grant date | Sep 8, 1987 |
| Priority date | — |
| Expiry date | Apr 5, 2004 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/562
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A vacuum metallizer comprises a vacuum chamber split into a number of sub-chambers by partitions. A material transport mechanism is disposed in one sub-chamber and metallizing sources in the others. Sub-chambers are individually pumped to provide close control of sub-chamber pressures. Sources are activated and when the length of material is drawn past them the metal of the sources is deposited thereon. Each partition comprises two sealed parts, one of which moves with the web transport mechanism while the other remains in the vacuum chamber when the chamber is opened. This enables a close gap to be maintained between partitions and mechanism which in turn restricts gas leakage between adjacent sub-chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.