Ion beam generator
US4692627A · kind A · utility
4Cited by
6References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1985 |
| Grant date | Sep 8, 1987 |
| Priority date | — |
| Expiry date | Oct 1, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/24
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion beam generator includes: an ion generating section for generating ions and where the material to be ionized is introduced; a gas discharge device for exciting the material to be ionized to a low excited state; a light source for introducing a light into the ion generating section, which light has a wavelength such that it excites the material to be ionized to an intermediate state from the low excited state of the material by a resonance excitation; and the specific material to be taken out as an ion beam being selectively ionized through the intermediate state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.