Semiconductor-chip gas-flow measuring apparatus
US4693116A · kind A · utility
14Cited by
12References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 1985 |
| Grant date | Sep 15, 1987 |
| Priority date | — |
| Expiry date | Nov 27, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/698
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas-flow measuring apparatus including a semiconductor chip and a sensing circuit. The semiconductor chip includes an electric heater and two temperature-detecting elements. One of the temperature-detecting elements is located closer to the heater than the other. The sensing circuit generates voltage in response to the flow rate of gas flowing through a gas passage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.