Vacuum coating apparatus
US4693803A · kind A · utility
16Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 1985 |
| Grant date | Sep 15, 1987 |
| Priority date | — |
| Expiry date | Mar 27, 2005 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/562
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A vacuum coating apparatus has a housing defining a vacuum chamber in chamber which a working roll is disposed over which material to be processed can be drawn. The chamber is split into several sub-chambers by means of partitions and sputter metallizing sources and glow discharge units are disposed in the chambers. The partitions are adjustable and enable the disposition and function of the apparatus to be altered within the confines of the original apparatus design.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.