Instrument for very high resolution ionic micro-analysis of a solid sample
US4694170A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Dec 24, 1985 |
| Grant date | Sep 15, 1987 |
| Priority date | — |
| Expiry date | Dec 24, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sample (EC) is mounted on a sample carrier (PO). Vertically thereabove a common optical portion (5) receives a beam of primary ions derived from an ion source (S10) together with a beam of primary electrons derived from an electron source (S30). The secondary electrons and ions due to the sample (EC) being bombarded by said primary ions and electrons are retrieved by said common optical portion (5). The electrons are detected by electron detection means (D40). The secondary optical system (2) transmits the secondary ions to a mass spectrometer (SP20). This instrument is capable of providing ion and electron images of a single sample simultaneously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.