Step and repeat apparatus
US4694776A · kind A · utility
5Cited by
2References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 1985 |
| Grant date | Sep 22, 1987 |
| Priority date | — |
| Expiry date | Jun 21, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Step and repeat apparatus used for performance operations upon a generally planar component such as a microprocessor wafer comprises a support for a workpiece, the support being attached by means of an arm to a mechanism adapted to move the support in two dimensions, the arm being pivotally secured to said mechanism at a location remote from the support and lifting means arranged to move the support about the pivot in a plane perpendicular to said two dimensions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.