Patent · US Expired

Heating oven

US4695707A · kind A · utility

29Cited by
4References
4Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 12, 1985
Grant dateSep 22, 1987
Priority date
Expiry dateAug 12, 2005

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B33/00
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A heating oven for use in ageing semiconductors comprises a heating chamber 5 for receiving a number of trays 10 of semiconductors. Each tray 10 can be passed into the heating chamber 5 and ejected from the heating chamber 5, without disturbing the temperature environment of the remaining trays 10 in the heating chamber 5. This is achieved by the provision of closeable openings 13 on the wall 11 of the heating chamber 5 through which trays 10 may be passed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.