Heating oven
US4695707A · kind A · utility
29Cited by
4References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 12, 1985 |
| Grant date | Sep 22, 1987 |
| Priority date | — |
| Expiry date | Aug 12, 2005 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B33/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A heating oven for use in ageing semiconductors comprises a heating chamber 5 for receiving a number of trays 10 of semiconductors. Each tray 10 can be passed into the heating chamber 5 and ejected from the heating chamber 5, without disturbing the temperature environment of the remaining trays 10 in the heating chamber 5. This is achieved by the provision of closeable openings 13 on the wall 11 of the heating chamber 5 through which trays 10 may be passed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.