Voltage calibration in E-beam probe using optical flooding
US4695794A · kind A · utility
62Cited by
1References
23Claims
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Key dates
| Filing date | May 31, 1985 |
| Grant date | Sep 22, 1987 |
| Priority date | — |
| Expiry date | May 31, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/305
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Method and apparatus for calibrating equipment used for testing photodiode arrays by reference to the diode under test. The diodes are illuminated with infrared radiation and different bias voltages, developed by bombardment with an electron beam, are measured at zero current. The measured voltage values are correlated with secondary emission sensor readouts to calibrate the sensor according to the specific diode being tested. Remote light emitting diodes generate the infrared radiation which is coupled to the photodiode array via optical fiber elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.