Method of forming built-up film of fluorinated aliphatic compound on substrate surface
US4696838A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 1986 |
| Grant date | Sep 29, 1987 |
| Priority date | — |
| Expiry date | Jun 16, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02285
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Using the Langmuir-Blodgett's technique and a compound represented by the general formula CF.sub.3 (CF.sub.2).sub.n (CH.sub.2).sub.m --X, wherein X is a hydrophilic group, preferably --COOH, n is from 5 to 20 and m is from 0 to 10, a firm built-up film having a desired number of monomolecular layers can surely be formed on a solid substrate surface by spreading a monomolecular film of the fluorinated compound on an aqueous phase containing trivalent metal ions. In the obtained built-up film the CF.sub.3 -terminated molecules are well oriented in the direction of the thickness of the film. The built-up film fully exhibits extreme hydrophobicity, high insulation, low refraction and other properties characteristic of the fluorine-containing compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.