Field-emission scanning auger electron microscope
US4698502A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 24, 1986 |
| Grant date | Oct 6, 1987 |
| Priority date | — |
| Expiry date | Jan 24, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An Auger electron microscope is equipped with a field-emission tip maintained at an essentially constant distance above the surface of the specimen. The tip may consist of a tungsten (100) whisker having a radius of .about.50 nm at the apex, the working distance being on the order of 1 mm. Auger electrons emitted from the surface of the specimen are collected by an electron energy analyzer for conventional processing. Mutual scanning displacement between the tip and specimen is obtained through use of an xyz-drive module, which is also responsible for adjusting the working distance of the tip. The entire microscope setup is mounted on vibration damping means and may be inserted into a vacuum system by means of an appropriate flange, if desired.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.