Module positioning apparatus
US4699555A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 8, 1986 |
| Grant date | Oct 13, 1987 |
| Priority date | — |
| Expiry date | May 8, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A housing has a flange for engagement with an evacuable vessel having a work table for supporting devices to be processed with an ion beam inside the vessel. The housing has rails extending into the vessel toward the work table. A carriage rides on the rails and has upstanding pins that engage a cassette carrying the masks to be processed. A transport mechanism housing is in sealing relationship with the bottom of the housing and supports a motor-driven drum about which a steel tape is wrapped and surrounded by a circumferential set of rollers. The far end of the steel tape is connected to the carriage. A loading door selectively closes the opening of the housing away from the vessel. The top of the housing includes a glass port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.