Patent · US Expired

Detector for back-scattered electrons

US4700075A · kind A · utility

21Cited by

4References

22Claims

0Family size

Assignee

Carl Zeiss Stiftung · DE

Inventors

Dieter Kurz · Bacharach, DE
Norbert Schafer · Oberkochen, DE

Key dates

Filing date	Jan 13, 1986
Grant date	Oct 13, 1987
Priority date	—
Expiry date	Jan 13, 2006

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24507
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A detector for back-scattered electrons includes a scintillator crystal and a light-conducting device for directing away the secondary radiation to a receiver. The light-conducting device is placed against the scintillator crystal in such a way that the secondary radiation is directed away symmetrically to two lines of symmetry. The two lines of symmetry are located in the plane of the scintillator crystal and are at right angles to one another. In this way, a uniform illumination of the scanned image is obtained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.