Method of making a nonplanar buried-heterostructure distributed-feedback laser

US4701995A · kind A · utility

Assignee

• American Telephone and Telegraph Company, AT&T Bell Laboratories · US

Inventors

• Gerald Dolan · Huntingdon Valley, US
• Ralph A. Logan · Morristown, US
• Henryk Temkin · Berkeley Heights, US
• Daniel Paul Wilt · Scotch Plains, US

Key dates

• Filing date: Oct 29, 1986
• Grant date: Oct 27, 1987
• Expiry date: Oct 29, 2006

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/2275
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A buried-heterostructure distributed feedback laser is described, including a grating structure at a surface of a nonplanar cladding layer. The grating structure can be made by transfer of a pattern by ion milling, the pattern being defined in an ion-beam resist layer, e.g., by direct-writing electron-beam exposure. Low-threshold, high-power lasers are obtained with a commercially favorable yield.