High temperature microscope
US4705366A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | May 27, 1986 |
| Grant date | Nov 10, 1987 |
| Priority date | — |
| Expiry date | May 27, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0004
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high temperature microscope having an optical system and a chamber system is disclosed. Frictional rotation of the peep window provided in the chamber system is caused together with frictional rotation of a first flange, in which the peep window is provided, and a second flange, which surrounds the first flange and is surrounded by a stationary third flange. It is thus possible to greatly delay the limit of the period, during which observation of the object can be made, due to fogging of the peep window. Double wall sealing ring members are provided between the first and second flanges and between the second and third flanges of the chamber of the high temperature microscope. The space between the double wall sealings can be evacuated through an inverted T-shaped ventilation hole provided in the second flange. Thus, the chamber can be evacuated to a superhigh vacuum higher than the vacuum degree obtainable in the chamber of the prior art high temperature microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.