Isolation of semiconductor contacts
US4705698A · kind A · utility
27Cited by
8References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 27, 1986 |
| Grant date | Nov 10, 1987 |
| Priority date | — |
| Expiry date | Oct 27, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
In a method of isolating segments of contacts on a substrate by laser scribing, a laser is directed on portions to be removed through the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.