Patent · US Expired

Method and apparatus relating to specimen cells for scanning electron microscopes

US4705949A · kind A · utility

20Cited by
2References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 25, 1985
Grant dateNov 10, 1987
Priority date
Expiry dateNov 25, 2005

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J37/20
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Disclosed is an improved specimen cell for maintaining a scanning electron microscope specimen under nearly physiological conditions during observation when said specimen includes liquids having a relatively high vapor pressure. A cavity in the specimen cell mounts an open or closed specimen module which is scanned by the electron beam through a small aperture. During preparation of the electron microscope for observation, the aperture is closed by a door so as to prevent evaporation of liquids from the specimen. The door is mechanically or electronically opened to facilitate observation thus minimizing the exposure of the specimen to the desiccation and/or destructive vacuum effects. Furthermore, the aperture is sized so as to provide a resistance to vapor flow through the aperture while permitting bidirectional electron flow facilitating the electron microscopic observation of the specimen. In a further embodiment, an open specimen module is provided which can be replenished with liquid or fluid, which can be vibrated, raised and/or lowered and which can be heated or cooled as desired during observation of the specimen.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.